dios.

otimoneltolti ynic ticmotlaçotiliz. in moteouh in motlahtocatzin. in dios. moch ica moyollo. = You vowed that you would love your Diety and Ruler, with all your heart (central Mexico, early seventeenth century)
Codex Chimalpahin: Society and Politics in Mexico Tenochtitlan, Tlatelolco, Culhuacan, and Other Nahuatl Altepetl in Central Mexico; The Nahuatl and Spanish Annals and Accounts Collected and Recorded by don Domingo de San Antón Muñón Chimalpahin Quauhtlehuanitzin, eds. and transl. Arthur J. O. Anderson and Susan Schroeder (Norman: University of Oklahoma Press, 1997), vol. 2, 130–131.

This loanword is very common in colonial Nahuatl. Alva's guide to confession uses it 75 times out of 260 total loanword appearances of various kinds. The percentages of appearances of certain loans in Alva are very consistent with Chimalpahin, who also wrote in the seventeenth century.
See Sell's comments in Bartolomé de Alva, A Guide to Confession Large and Small in the Mexican Language, 1634, eds. Barry D. Sell and John Frederick Schwaller, with Lu Ann Homza (Norman: University of Oklahoma Press, 1999), 23.

yeititzintzin teotlaCatzintzinti personas Ca san Se huel neli teol dios = three divine persons but one very true deity God. (Santa María de la Asunción, Toluca Valley, 1762)
Caterina Pizzigoni, ed., Testaments of Toluca (Stanford: Stanford University Press and UCLA Latin American Center Publications, 2007), 177.

dios (Coyoacan, 1548)
Frances Karttunen and James Lockhart, Nahuatl in the Middle Years: Language Contact Phenomena in Texts of the Colonial Period, Linguistics 85 (Los Angeles, University of California Publications, 1976), Doc. 1.

yn to d. (Huitzilopochco, circa 1550–55?))
Beyond the Codices, eds. Arthur J.O. Anderson, Frances Berdan, and James Lockhart (Los Angeles: UCLA Latin American Center, 1976), appendix

Teutl Tlahtohuani Dios = God, the highest ruler Susanne Klaus, Uprooted Christianity: The Preaching of the Christian Doctrine in Mexico, Based on Franciscan Sermons of the 16th Century Written in Nahuatl (Bonn: Bonner Amerikanistische Studien e. V. c/o Seminar für Völkerkunde, Universität Bonn, 1999), 249.

in ipalnemovani yn dios .. yn dios toteo .. in toteo dios .. yn ixquichivelli in dios (Huejotzingo, 1560)
Beyond the Codices, eds. Arthur J.O. Anderson, Frances Berdan, and James Lockhart (Los Angeles: UCLA Latin American Center, 1976), Doc. 29.

dios detantzin dios depiltzin dios espum s.ton (Chiucnauhpan, Coyoacan, 1608)
Frances Karttunen and James Lockhart, Nahuatl in the Middle Years: Language Contact Phenomena in Texts of the Colonial Period, Linguistics 85 (Los Angeles, University of California Publications, 1976), Doc. 3.

in tla nechmopol Tios = Dios me llevare (Zempoala, "1610", but probably Techialoyan -related)
Vidas y bienes olvidados: Testamentos en náhuatl y castellano del siglo XVII, vol. 3, Teresa Rojas Rabiela, et al, eds. (México: CIESAS, 2002), 76–77.